1.Wafer Introduction
Wafer Size: 12” Substrate Thickness: 775um
Substrate Type: P-type lightly doped
Packaging: Single-wafer box vacuum sealing packaging
Application Scenarios: Stage calibration for AFM, film thickness measurement equipment, SEM, 3D equipment, etc.
Model: KG-12”-XY-Type1, KG-12”-XY-Type2
2. Layout
Features XY Stage calibration function, adaptable to XY calibration at different magnifications.
Its layout is shown in the figure below: This standard wafer comes in two models, using different positioning marks, Type 1 and Type 2, to adapt to different algorithm requirements. Customers can choose the appropriate model based on their algorithm.
3. Stage precision data collection diagram
