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Semiconductor materials
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semiconductor materials
semiconductor materials
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Description
Semiconductor Materials
Silicon Wafers
Prime Wafer (substrate)
Test Wafer (process verification, tool calibration, single-step process verification, furnace dummy/shielding wafers)
SiO₂ Wafers (gate oxide, STI isolation, interlayer insulation, passivation, hard mask)
SiN (Si₃N₄) (surface passivation/protective layer, sidewall spacer, hard mask)
SOI Wafers
Epitaxial Wafers
Other Substrate Materials
Glass
Indium Phosphide (InP)
Indium Arsenide (InAs)
Gallium Nitride (GaN)
Gallium Arsenide (GaAs)
Silicon Carbide (SiC)
Feature Products
Visual Check: Cross-section
Visual Check: De-capsulation
Visual Check: AOI
Equipment Name :SAT (Scanning Acoustic Microscope)
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semiconductor materials
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